by NicholasBraithwaite (Author), PascalChabert (Author)
Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering.
Format: Hardcover
Pages: 394
Publisher: Cambridge University Press
Published: 24 Feb 2011
ISBN 10: 0521763002
ISBN 13: 9780521763004