Sub-Half-Micron Lithography ULSIs

Sub-Half-Micron Lithography ULSIs

by Katsumi Suzuki (Author)

Synopsis

Describes advanced techniques under development that represent the key to future semiconductor-device fabrication.

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Quantity

10 in stock

More Information

Format: Illustrated
Pages: 344
Edition: Revised ed.
Publisher: Cambridge University Press
Published: 10 Nov 2005

ISBN 10: 0521022347
ISBN 13: 9780521022347