Sub-Half-Micron Lithography for ULSIs

by Katsumi Suzuki (Author)

New
Paperback
2005
$48.14

Describes advanced techniques under development that represent the key to future semiconductor-device fabrication.

Synopsis

Describes advanced techniques under development that represent the key to future semiconductor-device fabrication.

$48.14

Quantity

10 in stock

More Information

Format: Paperback
Pages: 344
Edition: New Ed
Publisher: Cambridge University Press
Published: 10 Nov 2005
ISBN 10: 0521022347
ISBN 13: 9780521022347