Microsensors: Principles and Applications

by JulianW.Gardner (Author)

• Used

  Paperback
  1994

  $7.24

  The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors--the processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array devices. Features numerous examples.