by SimonM.Sze (Author)
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
Format: Hardcover
Pages: 568
Edition: 2nd Edition
Publisher: John Wiley & Sons
Published: 24 Sep 2001
ISBN 10: 0471333727
ISBN 13: 9780471333722