by Ashutosh Misra (Author), JeremiahD.Hogan (Author), RussellA.Chorush (Author)
This book brings together the most useful and important data on chemicals and gases used in the manufacture of semiconductor devices. It offers an A-to-Z listing of physical properties and safety information for more than 270 chemicals and gases used in the manufacture of semiconductor chips.
Format: Hardcover
Pages: 363
Publisher: Wiley-Blackwell
Published: 05 Apr 2002
ISBN 10: 0471316717
ISBN 13: 9780471316718