by Chapman (Author), C H A P M A (Author)
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
Format: Hardcover
Pages: 428
Edition: 1
Publisher: John Wiley & Sons
Published: 11 Sep 1980
ISBN 10: 047107828X
ISBN 13: 9780471078289