Digital Holography for MEMS and Microsystem Metrology (Microsystem and Nanotechnology Series (ME20))

by ErdalÇayirci (Editor)

• New

  Hardcover
  2011

  $129.35

  By taking a practical approach to the industrial inspection of digital holography, Digital Holography for MEMS and Microsystem Metrology offers a description of the use of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation and device testing and inspection.