Fundamental Principles of Optical Lithography: The Science of Microfabrication

by Chris Mack (Author)

• New

  Paperback
  2007

  $67.44

  Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.