Handbook of Cleaning in Semiconductor Manufacturing: Fundamental and Applications (Wiley-Scrivener)

by KarenA.Reinhardt (Editor), RichardF.Reidy (Editor)

• New

  Hardcover
  2011

  $288.24

  This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation.