by JohnA.Rogers (Editor), HongH.Lee (Editor)
Patterning or lithography is at the core of modern science and technology and cuts across all disciplines. With the emergence of nanotechnology, conventional methods based on electron beam lithography and extreme ultraviolet photolithography have become prohibitively expensive.
Format: Hardcover
Pages: 616
Edition: 1
Publisher: Wiley
Published: 28 Nov 2008
ISBN 10: 0470099577
ISBN 13: 9780470099575
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