by Tai-RanHsu (Author)
Technology/Engineering/Mechanical A bestselling MEMS text. now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology.
Format: Illustrated
Pages: 576
Edition: 2
Publisher: Wiley
Published: 29 Apr 2008
ISBN 10: 0470083018
ISBN 13: 9780470083017