Spectroscopic Ellipsometry: Principles and Applications

Spectroscopic Ellipsometry: Principles and Applications

by HiroyukiFujiwara (Author)

Synopsis

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE).

$208.30

Quantity

20+ in stock

More Information

Format: Hardcover
Pages: 388
Publisher: Wiley-Blackwell
Published: 26 Jan 2007

ISBN 10: 0470016086
ISBN 13: 9780470016084