by HiroyukiFujiwara (Author)
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE).
Format: Hardcover
Pages: 388
Publisher: Wiley-Blackwell
Published: 26 Jan 2007
ISBN 10: 0470016086
ISBN 13: 9780470016084