by Minhang Bao (Author)
Sensors and actuators are part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. This book presents the analysis and design principles of MEMS devices.
Format: Hardcover
Pages: 328
Publisher: Elsevier Science
Published: 12 Apr 2005
ISBN 10: 0444516166
ISBN 13: 9780444516169