Rapid Thermal Processing for Future Semiconductor Devices: Proceedings of the 2001 International Conference on Rapid Thermal Processing for Future ... Ise-Shima, Mie, Japan, November 14-16, 2001

by H.Fukuda (Author)

• New

  Paperback
  2003

  $139.69

  A collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. It covers the following areas such as advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe and hetero-structure.