Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies

New
Hardcover
2009
$219.13

Compiled from industrial and academic lecture notes and reflecting years of experience in the development of silicon devices, this book covers both their theoretical and practical aspects, and how their electrical properties and processing conditions interact.

Synopsis

Compiled from industrial and academic lecture notes and reflecting years of experience in the development of silicon devices, this book covers both their theoretical and practical aspects, and how their electrical properties and processing conditions interact.

$219.13

Quantity

20+ in stock

More Information

Format: Hardcover
Pages: 597
Publisher: Springer
Published: 12 Jan 2009
ISBN 10: 0387367985
ISBN 13: 9780387367989

Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies

New

$219.13

Synopsis

$219.13

More Information