Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

by Denis Flandre (Author), JeanLaconte (Author), Jean-PierreRaskin (Author)

• New

  Hardcover
  2006

  $206.15

  Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. This title demonstrates the successful co-integration of gas-flow sensors on dielectric membrane.