Electroceramic-Based MEMS: Fabrication-Technology and Applications (Electronic Materials: Science & Technology)

by NavaSetter (Editor)

• New

  Hardcover
  2005

  $289.94

  Focuses on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, and electronic components for high frequency communications.