by Richard A. Layton (Author), Thomas M. Adams (Author)
This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style.
Format: Illustrated
Pages: 462
Edition: 2010
Publisher: Springer
Published: 16 Feb 2010
ISBN 10: 0387095101
ISBN 13: 9780387095103
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