Optical Inspection of Microsystems: 0 (Optical Science and Engineering)

Optical Inspection of Microsystems: 0 (Optical Science and Engineering)

by Georg Siegmund (Contributor), Bing Zhao (Contributor), Alain Bosseboeuf (Contributor), Dietmar Vogel (Contributor), Georg Siegmund (Contributor), Cosme Furlong (Contributor), Anand Asundi (Contributor), Aiko K. Ruprecht (Contributor), Michael Wortge (Contributor), Huimin Xie (Contributor), Brian J. Thompson (Series Editor), Wolfgang Osten (Editor), Joanna Schmit (Contributor), Pietro Ferraro (Contributor), Tobias Wiesendanger (Contributor), Sylvain Petitgrand (Contributor), Roland Hofling (Contributor), Petra Aswendt (Contributor), Michael Serry (Contributor), Markus Huttel (Contributor), Leszek Salbut (Contributor), Kalus Korner (Contributor), Ingrid De Wolf (Contributor), Heinrich Steger (Contributor), Christophe Gorecki (Contributor), Christian Rembe (Contributor), Berud Michel (Contributor), Angela Duparre (Contributor)

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Format: Paperback
Pages: 532
Edition: 1
Publisher: CRC Press
Published: 17 Oct 2019

ISBN 10: 0367390574
ISBN 13: 9780367390570