Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)

by James K. Olthoff (Author), Loucas G. Christophorou (Author)

• New

  Illustrated
  2003

  $342.72

  The primary electron-molecule interaction processes of elastic and in- elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the- art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided.