by S.J.Moss (Author), A . Ledwith (Author)
This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some processes which are currently being developed and hold future promise.
Format: Hardcover
Pages: 444
Publisher: Springer
Published: 28 Feb 1989
ISBN 10: 0216920051
ISBN 13: 9780216920057