by PeterW.Hawkes (Series Editor), Dmitry Greenfield (Author), Mikhael Monastyrskii (Author)
Features articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, micro lithography, and image science and digital image processing. This book summarizes the authors' knowledge and experience acquired over many-years in their work on computational charged particle optics.
Format: Hardcover
Pages: 364
Publisher: Academic Press
Published: 12 Feb 2009
ISBN 10: 0123747171
ISBN 13: 9780123747174