by Beate Meffert (Author), Beate Meffert (Author), Henning Harmuth (Author), Peter W. Hawkes (Series Editor)
Features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains.
Format: Illustrated
Pages: 352
Edition: Illustrated
Publisher: Academic Press
Published: 12 Dec 2005
ISBN 10: 0120147793
ISBN 13: 9780120147793