Techniques and Challenges for 300mm Silicon: Processing, Characterization, Modelling and Equipment (European Materials Research Society Symposia Proceedings): Volume 81

by G. Ritter (Editor), H. Richter (Editor), P. Wagner (Editor)

• New

  Hardcover
  1999

  $152.13

  Includes papers that cover the E-MRS conference on Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modeling and Equipment. This book covers a wide range of subjects, financial issues, fab concepts, crystal growth, wafer process development, material and defect issues, and wafer characterization.