Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
by Jean Laconte,Denis Flandre,Jean-Pierre Raskin
ISBN 13: 9780387288420
Format: Hardcover (292 pages) Publisher: Springer Published: 28 Feb 2006
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Semiconductor-On-Insulator Materials for Nanoelectronics Applications (Engineering Materials)
by
ISBN 13: 9783642158674
Format: Hardcover (409 pages) Publisher: Springer Published: 08 Feb 2011