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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration by Jean Laconte,Denis Flandre,Jean-Pierre Raskin

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

by Jean Laconte,Denis Flandre,Jean-Pierre Raskin


ISBN 13: 9780387288420

Format: Hardcover (292 pages)
Publisher: Springer
Published: 28 Feb 2006

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