MEMS Reliability (MEMS Reference Shelf)
by Allyson L. Hartzell,Mark G. da Silva,Herbert R. Shea
ISBN 13: 9781441960177
Format: Hardcover (291 pages) Publisher: Springer Published: 10 Nov 2010
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Microelectromechanical Systems - Materials and Devices: Volume 1052 (MRS Proceedings)
by
ISBN 13: 9781558999909
Format: Hardcover (325 pages) Publisher: Materials Research Society Published: 17 Mar 2008