From MEMS to Bio-MEMS and Bio-NEMS (Fundamentals of Microfabrication and Nanotechnology)
by Marc J. Madou
ISBN 13: 9781420055160
Format: Hardcover (650 pages) Publisher: CRC Press Published: 15 Jul 2011
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Solid-state Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology (Fundmentals of Microfabrication and Nanotechnology)
ISBN 13: 9781420055115
Format: Hardcover (656 pages) Publisher: CRC Press Published: 15 Jul 2011