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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions: Fundamentals, Etching, Deposition and Surface ... (Materials Science and Process Technology)

by Stephen M. Rossnagel,William D. Westwood,Jerome J. Haber

ISBN 13: 9780815512202

Format: Hardcover (546 pages)
Publisher: William Andrew
Published: 31 Dec 1990

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