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Pulsed and Pulsed Bias Sputtering: Principles and Applications Pulsed and Pulsed Bias Sputtering: Principles and Applications by Edward V. Barnat,Toh-Ming Lu

Pulsed and Pulsed Bias Sputtering: Principles and Applications

by Edward V. Barnat,Toh-Ming Lu


ISBN 13: 9781402075438

Format: Illustrated (180 pages)
Publisher: Springer
Published: 01 Sep 2003

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