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Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules) Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules) by Loucas G. Christophorou,James K. Olthoff

Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)

by Loucas G. Christophorou,James K. Olthoff


ISBN 13: 9781461347415

Format: Paperback (800 pages)
Publisher: Springer
Published: 21 Sep 2012

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