Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies
by Badih El-Kareh
ISBN 13: 9780387367989
Format: Hardcover (597 pages) Publisher: Springer Published: 12 Jan 2009
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Fundamentals of Semiconductor Processing Technologies
ISBN 13: 9780792395348
Format: Hardcover (616 pages) Publisher: Springer Published: 31 Dec 1994