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Precision Manufacturing

by David Dornfeld, Dae-Eun Lee

ISBN 13: 9780387324678

Format: Hardcover (775 pages)
Publisher: Springer
Published: 06 Dec 2007

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Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales

by Jianfeng Luo,David Dornfeld

ISBN 13: 9783540223696

Format: Hardcover (311 pages)
Publisher: Springer
Published: 07 Oct 2004

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