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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms And Application To Ic Interconnect Technology

by Christopher Lyle Borst,William N. Gill,Ronald J. Gutmann

ISBN 13: 9781461354246

Format: Paperback (248 pages)
Publisher: Springer
Published: 23 Feb 2014

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