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Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models (Microtechnology and MEMS) Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models (Microtechnology and MEMS) by Tamara Bechtold,Evgenii B. Rudnyi,Jan G. Korvink

Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models (Microtechnology and MEMS)

by Tamara Bechtold,Evgenii B. Rudnyi,Jan G. Korvink


ISBN 13: 9783540346128

Format: Hardcover (191 pages)
Publisher: Springer
Published: 06 Oct 2006

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