by Anthony C. Jones (Author), Michael L. Hitchman (Editor)
A comprehensive overview on the key aspects of chemical vapour deposition processes written by practising CVD technologists who are also leading international experts.
Format: Illustrated
Pages: 600
Edition: Illustrated
Publisher: Royal Society of Chemistry
Published: 22 Dec 2008
ISBN 10: 0854044655
ISBN 13: 9780854044658